Micro- and Nanofabrication
Current:
UCSD Integrated Technologies Laboratory (ITL) provides baseline fabrication capability
Future:
Dedicated clean-room space, Cal-(IT)2
building
Advanced tools for lithography,
etching, etc.
Technical staff support
Accessible to UCSD and outside
researchers
Central Characterization Facilities
Located in new ITIS Building
Mantained by Qualified Technical
Staff
Micro and Atomic Scale Analysis
of Novel Materials and Devices
Thermo Gravimetric Analysis (TGA)
Differential Scanning Calorimeter (DSC)
Optical Refractometers
Fluorimeter
Micro Raman spectrometer
Scanning Probe Microscope (SPM)
Profilometer
Spectroscopic ellipsometer
Optical microscopes with CCD cameras and internet links (near-field, far-field,
and fluorescence)
XPS
Custom special-purpose equipment
Fiber Optics Links for remote operation and visualization