Materials and Devices Layer at UCSD
Fabrication and Characterization Facility
 

Micro- and Nanofabrication

Current:

UCSD Integrated Technologies Laboratory (ITL) provides baseline fabrication capability

Future:

Dedicated clean-room space, Cal-(IT)2 building
Advanced tools for lithography, etching, etc.
Technical staff support
Accessible to UCSD and outside researchers
 

Central Characterization Facilities

Located in new ITIS Building
Mantained by Qualified Technical Staff
Micro and Atomic Scale Analysis of Novel Materials and Devices

Thermo Gravimetric Analysis (TGA)
Differential Scanning Calorimeter (DSC)
Optical Refractometers
Fluorimeter
Micro Raman spectrometer
Scanning Probe Microscope (SPM)
Profilometer
Spectroscopic ellipsometer
Optical microscopes with CCD cameras and internet links (near-field, far-field, and fluorescence)
XPS
Custom special-purpose equipment
Fiber Optics Links for remote operation and visualization