Materials and Devices Layer at UCSD
Fabrication and Characterization Facility

Micro- and Nanofabrication


UCSD Integrated Technologies Laboratory (ITL) provides baseline fabrication capability


Dedicated clean-room space, Cal-(IT)2 building
Advanced tools for lithography, etching, etc.
Technical staff support
Accessible to UCSD and outside researchers

Central Characterization Facilities

Located in new ITIS Building
Mantained by Qualified Technical Staff
Micro and Atomic Scale Analysis of Novel Materials and Devices

Thermo Gravimetric Analysis (TGA)
Differential Scanning Calorimeter (DSC)
Optical Refractometers
Micro Raman spectrometer
Scanning Probe Microscope (SPM)
Spectroscopic ellipsometer
Optical microscopes with CCD cameras and internet links (near-field, far-field, and fluorescence)
Custom special-purpose equipment
Fiber Optics Links for remote operation and visualization